ORGANIZATION OF A MINI-FACTORY
The SRISA RAS mini-factory was created to conduct scientific research in the field of creating technological processes for the production of integrated circuits, developing methods for improving the reliability and durability of integrated circuits, as well as organizing small-scale production of domestic integrated circuits in order to verify the obtained scientific results.
THE DEVELOPMENT OF PRODUCTION WAS CARRIED OUT TO PROVIDE TWO DIRECTIONS:
- development of modern technological solutions in the manufacture of integrated circuits;
- approbation of the developed solutions within the framework of a single one-time production of ULSI.
TECHNICAL SOLUTIONS
MAIN SOLUTIONS OF THE MINI-FACTORY SRISA RAS:
- strict regulation of technological experiments within the framework of a single production process;
- development of integrated circuits based on certified design rules (libraries), including ensuring and monitoring the conformity of the design to the process;
- introduction of a total system of statistical control of the production process of ULSI manufacturing;
- reduction of the volume of control tests due to the use of the principles of constructive and technological similarity:
- grouping of integrated circuits according to baseline technological process;
- grouping of integrated circuits according to chip package (“groups of types”);
- accelerated testing.
- reduction in the range of technological and test equipment due to the unification of the ULSI design and unified test modes;
- ensuring the possibility of assessing reliability by accumulating test results of constructively and technologically similar ULSI.
RESULTS
MAIN RESULTS:
- baseline processes CMOS 0.5, CMOS 0.35 have been developed and characterized. The development of the CMOS 0.25 process is being completed;
- the corresponding rules and design libraries Lib 05 have been developed;
- the number of iterations in the development of ULSI was minimized due to strict observance of the design rules and maintenance of the technological process in a constantly stable state (the first pass success principle was implemented);
- the time for preparation of technological documentation is reduced more than ten times through the use of basic technological solutions;
- the duration of checks and tests is reduced by 2 - 4 times due to the use of the principles of constructive and technological similarity and forcing test modes while maintaining the reliability of the results;
- the procedure for interaction between a manufacturer and a third-party developer has been debugged based on the use of baseline processes (in fabless/foundry modes).
The specific features of the mini-factory of the FSI FSC SRISA RAS determine high requirements for the level of organization of the production process. Since 2002, the company has been constantly improving the quality management system procedures and developing automated solutions aimed at improving the efficiency of these procedures.
CURRENTLY, AT THE MINI-FACTORY OF THE FSI FSC SRISA RAS THE FOLLOWING SOLUTIONS DESIGNED TO INCREASE THE QUALITY OF THE PRODUCTION PROCESS ARE USED:
- monitoring and control systems for process equipment;
- systems for managing the processes of preparing production and manufacturing products;
- quality control systems for the production process.
SYSTEMS FOR MONITORING AND CONTROL OF TECHNOLOGICAL EQUIPMENT:
- contain the definition of 95,000 sensors of 90 pieces of equipment that supports various communication standards, including SECSII/GEM, OPC, S7, and also provide the collection in "real time" of about 10,000 sensor values per second;
- carry out automatic control of the state of technological and engineering equipment, including notification of maintenance personnel about alarm events and emergencies;
PRODUCTION PREPARATION AND MANUFACTURING PROCESS CONTROL SYSTEMS:
- ensure the planning and control of the maintenance of equipment, including the management of the consumption of spare parts and materials;
- carry out planning and control of the implementation of auxiliary technological operations and routes (certification of technological equipment, preparatory and control processes, routes for the restoration of wafers);
- allow automatic registration of information on the performance of technological operations in the format of an electronic accompanying sheet;
PRODUCTION PROCESS QUALITY CONTROL SYSTEMS:
- provide total traceability of the movement of products with the possibility of obtaining information about the life cycle of each wafer: receipt and placement, processing results in a microchip production, functional control results, results of mounting a microchip in a chip package, integrated circuit test results;
- implement statistical quality control based on MA, EWMA, CUSUM control charts, which allows determining the reproducibility of production and technological processes, as well as the moments when their characteristics go out of control.
EFFICIENT QUALITY CONTROL OF FINISHED GOODS
- testing for the impact of mechanical factors;
- testing for the impact of climatic factors, including testing for the impact of high humidity in accelerated test methods with an acceleration factor of 28;
- testing for compliance with design and technological requirements by high-performance methods, including:
- optical method of tightness control;
- unique solderability test method;
- high performance static electricity discharge sensitivity test;
- reliability tests in accelerated test methods with an acceleration factor of 2.2;
BASELINE PROCESS: AN INTEGRAL UNITY OF FOUR ELEMENTS
- a single manufacturing route and the same modes of technological operations (a single set of technological documents for the basic process);
- unified methods, tools and criteria for technological process control (universal parametric monitor, unified system, methods and criteria for operational control);
- unified design rules (constructive and technological constraints);
- stable (controlled) technological process.
BASELINE PROCESS - a technological process focused on the manufacture of a wide range of functionally different, but structurally similar products, designed according to the design rules developed for this process.
DESIGN RULES - a set of norms, constraints, rules and procedures presented in established formats developed for the baseline process; compliance with these rules when designing ULSI chips ensures that they can be manufactured in the baseline process in accordance with established quality and reliability requirements.
PARAMETRIC MONITOR - a set of test structures on a wafer, designed to monitor the output characteristics of technological operations and the manufacturing process of ULSI.
ORGANIZATION OF THE PRODUCTION CYCLE ON THE BASIS OF BASIC PROCESSES ALLOWED TO:
- drastically reduce the overall integrated circuit development time - from conception to production;
- to exclude as much as possible an iterative approach to the development of an integrated circuit - to introduce the principle of “first pass success” due to strict observance of the design rules and maintaining the technological process in a constantly stable state;
- to reduce as much as possible the time of preparation of design documentation and technical documentation, development and manufacture of tooling through the use of basic design and technological solutions;
- to reduce the volume and duration of checks and tests as much as possible by using the principles of constructive and technological similarity and process-oriented forcing of test modes.